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Semitron® Semiconductor Grade Products ( Bán dẫn)

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Product Code

Semitron MDS 100

Status

stock

Product Overview

The Semitron® Semiconductor Grade products were developed to help designers and users optimize the performance of device manufacturing equipment.  In addition to device manufacture, many of these materials are ideal for specific environments where wear-resistance, chemical-resistance and the management of static electricity are required.

Two groups of products have been developed.  One, well suited for device handling and test applications, and a second for next-generation CMP use.

 

Semitron MP 370 offers more choices in the design and manufacture of precision test sockets for the semiconductor manufacture industry.  While maintaining the same excellent moisture absorption and high thermal resistance of PEEK, Semitron MP 370 provides greater strength and dimensional stability.  This custom formulation allows finer and cleaner detail due to it's excellent machinability.

  • Very low moisture absorption
  • Exceptional machinability - very small holes and tight hole patterns are possible
  • Strength and stiffness that exceed unfilled PEEK materials
  • Low internal stresses and no "soft center" problems associated with injection molded blanks

Semitron MDS 100 has a remarkable combination of strength, stiffness and stability.  It was developed to be used in uncontrolled application environments or where a high level of precision is required.  It is an ideal choice for semiconductor test sockets, nests and fixtures in test and package equipment.

  • Moisture absorption of 0.10% at 24 hrs. (per ASTM D570).
  • Thermal performance to 210 °C (410 °C)
  • Flexural modulus > 1,400,000 psi

Semitron ESd 225 is ideal for fixturing used in the manufacturing of hard disk drives or for handling in-process silicon wafers. It is tan in colour.

  • Surface resistivity: 1010 - 1012 ohms/sq.
  • Thermal performance to 107 °C (225 °F)
  • Good wear resistance

Semitron ESd 410c is ideal for handling integrated circuits through the test handler environment. It is black in color and opaque.

  • Surface resistivity: 104 - 106 ohms/sq.
  • Thermal performance to 210 °C (410 °F)
  • Low stress for tight tolerance machining
  • High strength and stiffness

Semitron ESd 420 is the only, truly dissipative plastic product for use in high temperature applications.

  • Surface resistivity: 106 - 109 ohms/sq.
  • Thermal performance

Semitron ESd 420V offers dissipative performance of 106 - 109 ohms/sq. over it's full temperature performance range.  It is a stiff, high strength material that is not subject to dimensional change as a result of exposure to moisture.  Semitron ESd 420V is a cost effective alternative for applications that do not require the thermal performance of ultra-high performance materials.

This PEEK based static dissipative material provides a dissipative range of 106 - 109 ohms/sq.  Semitron ESd 480 is very dimensionally stable, making it ideal for critical test fixture applications.  Its exceptional chemical resistance makes it well suited for use in wafer handling and other structural applications in wet process tools where static dissipation is important.  Like all Semitron ESd products of Mitsubishi Chemical Advanced Materials , Semitron ESd480 is not subject to dielectric breakdown.  (Refer to Engineering Notes on this page.)

 

SEMITRON ESD 490HR A slightly higher resistivity PEEK based material that offers similar physical properties as Semitron ESd 480.

  • Surface resistivity: 1010 - 1012 ohms/sq

Reinforced with a proprietary synthetic mica, Semitron ESd 500HR offers an excellent combination of low frictional properties and dimensional stability. Semitron ESd 500HR should be considered wherever PTFE is used. It is ideal for applications where controlled bleed off of static charges is critical. It is white in color.

  • Surface resistivity: 1010 - 1012 ohms/sq
  • Thermal performance to 260 °C (500 °F)
  • Thermally insulative
  • Very low coefficient of friction
  • Broad chemical resistance

Semitron ESd 520HR has an industry first combination of electrostatic dissipation (ESd), high strength and heat resistance. This new ESd material is ideal for making nests, sockets and contactors for test equipment and other device handling components. The key features of 520HR are its unique ability to resist dielectric breakdown at high voltages (>100V). The graph below demonstrates the electrical performance of plastic materials commonly used in automated test handlers. Typical carbon fiber enhanced products become irreversibly more conductive when exposed to even moderate voltage.

Only Semitron ESd 520HR maintains its performance throughout the voltage range, while offering the mechanical performance needed to excel in demanding applications.

  • Surface resistivity: 1010 - 1012 ohms/sq

Semitron® CMP Materials

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The Semitron CMP product line was developed to give new tool designers and forward-thinking end users an opportunity to increase the number of devices successfully produced per wafer while decreasing the cost of consumables per device.  This is achieved by increasing the service life of the retaining ring.

CMP Optimized PET-P
Semitron CMP LL5 is one of the next-generation materials developed to significantly increase the performance possible from CMP tools. It is white in color and opaque.

  • Long life material - up to 5x PPS
  • Ideal for CMP applications up to 60 °C (140 °F)
  • Best performance in oxide chemistries - up to 8x PPS

CMP Optimized PAI

Semitron CMP XL20 is the premium CMP material developed by Mitsubishi Chemical Advanced Materials' Research & Development Team.  It is charcoal/black in colour and opaque.

  • Significantly lower cost per wafer
  • Outperforms PPS up to 20x in most processes
  • High strength and stiffness promotes fewer edge defects and better uniformity

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